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POLYMER FOR COMPOSITION FOR FORMING ORGANIC FILM, METHOD FOR MANUFACTURING THE SAME, COMPOSITION FOR FORMING ORGANIC FILM CONTAINING THE POLYMER, METHOD FOR FORMING ORGANIC FILM USING THE COMPOSITION, AND PATTERNING PROCESS USING THE COMPOSITION
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§ Ⅰ
Dossier Overview
Applicant
SHIN-ETSU CHEMICAL CO., LTD.
Inventor
SAWAMURA, Takashi; IMATA, Tomohiro; MATSUBARA, Satoshi
Filing Date
Jun 17, 2025
Publication Date
Jan 6, 2026
IPC Classification
G03FC09DG03F
CPC Classification
G03FG03FC09DC08GC08G
External Resources