Dossier

SPUTTERING APPARATUS AND METHOD

InventionPending

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§ Ⅰ

Dossier Overview

Applicant

BAE SYSTEMS plc

Inventor

The designation of the inventor has not yet been filed

Filing Date

Jul 3, 2024

Publication Date

Jan 6, 2026

IPC Classification

H01JH01J

CPC Classification

H01JH01JH01JH01JH01JH01JH01J

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