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가열 포집 및 냉각 포집하는 반응부산물 포집장치
Inventionpatent.status.granted
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§ Ⅰ
Dossier Overview
Applicant
Inventor
차일수; 김용윤
Filing Date
Jun 25, 2024
Publication Date
Dec 31, 2025
IPC Classification
H1L 21/67B1D 46/42C23C 16/44
CPC Classification
H1L21/67017B1D46/4263C23C16/4412B1D2258/216
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