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스퍼터링 타깃
Inventionpatent.status.granted
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§ Ⅰ
Dossier Overview
Applicant
Inventor
데라무라 교스케; 히로후지 겐타로
Filing Date
Jan 16, 2023
Publication Date
Dec 31, 2025
IPC Classification
C23C 14/34H1J 37/34
CPC Classification
C23C14/3414H1J37/3423H1J37/3429H1J37/3491
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