Dossier

기판 처리 방법 및 기판 처리 장치

Inventionpatent.status.granted

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Dossier Overview

Applicant

Inventor

스미 노리타케

Filing Date

Aug 23, 2024

Publication Date

Dec 31, 2025

IPC Classification

H1L 21/2H1L 21/67H1L 21/677H1L 21/687

CPC Classification

H1L21/2101H1L21/2057H1L21/67034H1L21/67051H1L21/67155H1L21/67742H1L21/67748H1L21/68728

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