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기판 처리 장치
Inventionpatent.status.granted
§ Ⅰ
Dossier Overview
Applicant
Inventor
김형규; 오승훈; 김은석; 권혜빈
Filing Date
Jun 10, 2024
Publication Date
Dec 31, 2025
IPC Classification
H1L 21/67
CPC Classification
H1L21/67034H1L21/67098H1L21/67248
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