Dossier

기판 처리 장치

Inventionpatent.status.granted

§ Ⅰ

Dossier Overview

Applicant

Inventor

김형규; 오승훈; 김은석

Filing Date

May 28, 2024

Publication Date

Dec 31, 2025

IPC Classification

H1L 21/687H1L 21/67H1L 21/677

CPC Classification

H1L21/68785H1L21/67017H1L21/67778H1L21/68742H1L21/68764

External Resources