WAVEPLATE COMPENSATOR DESIGN
Dossier Overview
Applicant
KLA Corporation
Inventor
Paul Aoyagi
IPC Classification
CPC Classification
A waveplate compensator includes birefringent material layers and spacer layers. Each of the birefringent material layers has a thickness less than or equal to 35 μm. Each adjacent pair of the birefringent material layers in a stack is separated by one of the spacer layers. The birefringent material layers and the spacer layers are disposed in contact with each other using optical contact bonding.
Original (Chinese)
A waveplate compensator includes birefringent material layers and spacer layers. Each of the birefringent material layers has a thickness less than or equal to 35 μm. Each adjacent pair of the birefringent material layers in a stack is separated by one of the spacer layers. The birefringent material layers and the spacer layers are disposed in contact with each other using optical contact bonding.
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