ADAPTIVE OPTICAL ELEMENT HAVING AN INSERTION ELEMENT
Dossier Overview
Applicant
Carl Zeiss SMT GmbH
Inventor
Dieter BADER
IPC Classification
CPC Classification
An adaptive optical element for a microlithographic projection exposure apparatus, comprising: a substrate; an optically effective surface; and at least one solid-state actuator for at least partial deflection or deformation of the optically effective surface. At least one bore extends through at least regions of the substrate. An insertion element comprises the at least one solid-state actuator. The insertion element is in the bore so that the at least one solid-state actuator is affixed at a predetermined position within the bore.
Original (Chinese)
An adaptive optical element for a microlithographic projection exposure apparatus, comprising: a substrate; an optically effective surface; and at least one solid-state actuator for at least partial deflection or deformation of the optically effective surface. At least one bore extends through at least regions of the substrate. An insertion element comprises the at least one solid-state actuator. The insertion element is in the bore so that the at least one solid-state actuator is affixed at a predetermined position within the bore.
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