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Semiconductor structure and manufacturing method thereof

发明专利审中
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16权利要求 · 2 独立
§ Ⅰ

卷宗概要

发明人

Hung-Chan Lin; Yu-Ping Wang; Chien-Ting Lin

IPC 分类

G11C 11/16H10B 61/H10N 50/1H10N 50/10H10N 50/80H10N 50/85

CPC 分类

G11C11/161H10B61/H10N50/1H10N50/10H10N50/80H10N50/85

The invention provides a semiconductor structure, which comprises an inter-metal dielectric layer disposed on the substrate, a metal interconnection disposed in the inter-metal dielectric layer, wherein at least a portion of a top surface of the inter-metal dielectric layer is lower than a top surface of the metal interconnection, a MTJ (magnetic tunneling junction) stacked structure disposed on the metal interconnection, and a SOT (spin orbit torque) layer arranged on the MTJ stacked structure, wherein the SOT layer comprises a first part with a thick thickness and two second parts with a thin thickness.

原文(中文)

The invention provides a semiconductor structure, which comprises an inter-metal dielectric layer disposed on the substrate, a metal interconnection disposed in the inter-metal dielectric layer, wherein at least a portion of a top surface of the inter-metal dielectric layer is lower than a top surface of the metal interconnection, a MTJ (magnetic tunneling junction) stacked structure disposed on the metal interconnection, and a SOT (spin orbit torque) layer arranged on the MTJ stacked structure, wherein the SOT layer comprises a first part with a thick thickness and two second parts with a thin thickness.