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METHOD FOR PREPARING TOPCON SOLAR CELL AND TOPCON SOLAR CELL

发明专利审中
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20权利要求 · 1 独立
§ Ⅰ

卷宗概要

发明人

Feng LIU; Yuanfang ZHANG; Zhao WANG; Jie YANG; Peiting ZHENG; Xinyu ZHANG

IPC 分类

H10F 71/H10F 77/30H10F 77/70

CPC 分类

H10F71/129H10F71/121H10F71/134H10F77/311H10F77/703

The present application provides a method for preparing a TOPCON cell and a TOPCON cell. The preparation method includes steps of: double-sided texturing the silicon wafer multiple times. Polysilicon is deposited on the front side, and then phosphorus diffusion is performed to form a doped polysilicon layer and a phosphorosilicate glass; alternatively, the phosphorus diffusion is performed to form the phosphorus diffused layer and the phosphorosilicate glass. Laser grooving is performed to form localized emitters. After third double-sided texturing on the silicon wafer, the double-sided rounding is performed.

原文(中文)

The present application provides a method for preparing a TOPCON cell and a TOPCON cell. The preparation method includes steps of: double-sided texturing the silicon wafer multiple times. Polysilicon is deposited on the front side, and then phosphorus diffusion is performed to form a doped polysilicon layer and a phosphorosilicate glass; alternatively, the phosphorus diffusion is performed to form the phosphorus diffused layer and the phosphorosilicate glass. Laser grooving is performed to form localized emitters. After third double-sided texturing on the silicon wafer, the double-sided rounding is performed.