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Flexible pressure sensor and preparation method thereof, and electronic device

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Source: EPO OPS

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72949987Family
§ Ⅰ

Dossier Overview

Applicant

BOE TECHNOLOGY GROUP CO LTD; BEIJING BOE TECHNOLOGY DEV CO LTD

Application number

CN202010723154

Inventor

LIANG KUI

Filing Date

Jul 24, 2020

Publication Date

Oct 4, 2022

Patent Family ID

72949987

IPC Classification

G01L1/14G01L1/22G01L9/04G01L9/12

CPC Classification

G01L1/142G01L1/22G01L9/04G01L9/12

The invention provides a flexible pressure sensor and a preparation method thereof, and an electronic device. The flexible pressure sensor comprises a first electrode and a second electrode which areoppositely arranged, wherein a first dielectric layer and a second dielectric layer are arranged between the first electrode and the second electrode, the second dielectric layer is located between the first dielectric layer and the second electrode, the elasticity modulus of the first dielectric layer and the elasticity modulus of the second dielectric layer are different, and at least one of thefirst dielectric layer and the second dielectric layer is internally provided with a hollow structure. The flexible pressure sensor has the advantages of high sensitivity and wide range. According tothe flexible pressure sensor, the hollow structure in the dielectric layer can be prepared through a template, and the preparation method is simple.

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