Flexible pressure sensor and preparation method thereof, and electronic device
Source: EPO OPS
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Dossier Overview
Application number
CN202010723154
Inventor
LIANG KUI
Filing Date
Jul 24, 2020
Publication Date
Oct 4, 2022
Patent Family ID
72949987
IPC Classification
CPC Classification
The invention provides a flexible pressure sensor and a preparation method thereof, and an electronic device. The flexible pressure sensor comprises a first electrode and a second electrode which areoppositely arranged, wherein a first dielectric layer and a second dielectric layer are arranged between the first electrode and the second electrode, the second dielectric layer is located between the first dielectric layer and the second electrode, the elasticity modulus of the first dielectric layer and the elasticity modulus of the second dielectric layer are different, and at least one of thefirst dielectric layer and the second dielectric layer is internally provided with a hollow structure. The flexible pressure sensor has the advantages of high sensitivity and wide range. According tothe flexible pressure sensor, the hollow structure in the dielectric layer can be prepared through a template, and the preparation method is simple.
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