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Array substrate and ultrasonic detection device

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Source: EPO OPS

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91998807Family
§ Ⅰ

Dossier Overview

Applicant

BOE TECHNOLOGY GROUP CO LTD; BEIJING BOE TECHNOLOGY DEV CO LTD

Application number

CN202410512282

Inventor

LIU WENQU; CAO YONGGANG; ZHANG FENG; CUI ZHAO; LU XINHONG

Filing Date

Apr 26, 2024

Publication Date

Jul 26, 2024

Patent Family ID

91998807

IPC Classification

G01D5/48H01L27/12

CPC Classification

G01D5/48H10D86/421H10D86/423H10D86/451H10D86/471H10D86/60

The invention provides an array substrate and an ultrasonic detection device. The array substrate comprises a substrate, a control circuit and a piezoelectric unit, wherein the control circuit and the piezoelectric unit are located on the substrate; the control circuit includes: a first transistor and a second transistor; the active layer of the first transistor is made of a low-temperature polycrystalline silicon material; the active layer of the second transistor is made of an oxide material; at least one interlayer insulating layer and at least one planarization layer are arranged between the film layer where the grid electrode of the second transistor is located and the film layer where the source drain electrode of the second transistor is located.

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