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Ray detector, preparation method and electronic equipment

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Source: EPO OPS

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89026507Family
§ Ⅰ

Dossier Overview

Applicant

BOE TECHNOLOGY GROUP CO LTD

Application number

CN20228001530

Inventor

WU HAO; GUAN FENG; DU JIANHUA; LYU YANG; YAN RUI; ZHAO MENG; WANG CHAOLU

Filing Date

May 30, 2022

Publication Date

Aug 30, 2024

Patent Family ID

89026507

IPC Classification

H01L27/146H01L29/786

CPC Classification

H10D30/67H10D30/6755H10F30/223H10F39/016H10F39/12H10F71/128H10F77/148H10F77/169

The invention provides a ray detector, a preparation method and electronic equipment, belongs to the technical field of semiconductors, and can solve the problem of high preparation cost. The invention discloses a preparation method of a ray detector. The preparation method comprises the steps of preparing a buffer layer on a first surface of a substrate; wherein the first surface of the substrate comprises a first area and a second area; preparing a shared layer on the surface, away from the substrate, of the buffer layer; processing the sharing layer corresponding to the first region to obtain an active layer of the thin film transistor; and processing the sharing layer corresponding to the second region to obtain the absorption layer of the photodiode.

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