Ray detector, preparation method and electronic equipment
Source: EPO OPS
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Dossier Overview
Application number
CN20228001530
Inventor
WU HAO; GUAN FENG; DU JIANHUA; LYU YANG; YAN RUI; ZHAO MENG; WANG CHAOLU
Filing Date
May 30, 2022
Publication Date
Aug 30, 2024
Patent Family ID
89026507
IPC Classification
CPC Classification
The invention provides a ray detector, a preparation method and electronic equipment, belongs to the technical field of semiconductors, and can solve the problem of high preparation cost. The invention discloses a preparation method of a ray detector. The preparation method comprises the steps of preparing a buffer layer on a first surface of a substrate; wherein the first surface of the substrate comprises a first area and a second area; preparing a shared layer on the surface, away from the substrate, of the buffer layer; processing the sharing layer corresponding to the first region to obtain an active layer of the thin film transistor; and processing the sharing layer corresponding to the second region to obtain the absorption layer of the photodiode.
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