Filter unit, preparation method thereof and electronic equipment
Source: EPO OPS
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Dossier Overview
Applicant
BOE TECHNOLOGY GROUP CO LTD; BEIJING BOE OPTOELECTRONICS TECH CO LTD
Application number
CN20228002249
Inventor
WEI QIUXU; LI YUE; WANG LIHUI; REN YANFEI; ZHANG TAONAN; XIAO YUELEI; WU YIFAN; FENG YULIN; CAO XUE; HAN JI; ANZAI AKIRA; CHANG WENBO; LI HUIYING; QU FENG
Filing Date
Jul 18, 2022
Publication Date
Aug 30, 2024
Patent Family ID
89616642
IPC Classification
CPC Classification
The invention provides a filter unit, a preparation method thereof and electronic equipment, and relates to the technical field of radio frequency micro electro mechanical systems. The substrate is arranged on one side of the resonant structure, the substrate comprises a modified structure and a supporting structure surrounding the modified structure, and a cavity is formed between the modified structure and the resonant structure. According to the filter unit provided by the invention, the cavity is formed between the modified structure and the resonant structure, so that the technological preparation flow can be greatly simplified, and the technological process difficulty is reduced.
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