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Piezoelectric actuator, piezoelectric vibrator, and electronic device

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Source: EPO OPS

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92717865Family
§ Ⅰ

Dossier Overview

Applicant

HUAWEI TECH CO LTD

Application number

CN202310284668

Inventor

WU NAN; WANG CHENYU

Filing Date

Mar 17, 2023

Publication Date

Sep 20, 2024

Patent Family ID

92717865

IPC Classification

H10N30/20H10N30/87

CPC Classification

H10N30/2042H10N30/874H10N30/875

The embodiment of the invention discloses a piezoelectric actuator, a piezoelectric vibrator and electronic equipment. A piezoelectric substrate of the piezoelectric vibrator comprises a vibrator mounting part and a fixed frame, the vibrator mounting part and the fixed frame are connected through a plurality of connecting parts, each connecting part comprises an outward extending part and two cantilevers, the two cantilevers are arranged in a V shape, and openings of the cantilevers face the vibrator mounting part; the first ends of the two cantilevers are respectively connected with the fixed frame, and the second ends of the two cantilevers are connected with the vibrator mounting part through the outward extending parts. Based on the configuration of the extension part, the two cantilevers and the second ends connected with the cantilevers are far away from the vibrator mounting part, the area of a bonding and fixing area formed by the fixing frame is increased, and the holding performance can be effectively improved; meanwhile, in the breadth of the piezoelectric substrate, the lengths of the two cantilevers extending in the inclined direction are increased, the constraint rigidity in the amplitude direction can be reduced, and the amplitude is effectively improved. On the basis of the structural form of the connecting part in the embodiment, good fatigue resistance is achieved in a high-amplitude use state.

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