Photocathode, electron source module and electronic equipment
Source: EPO OPS
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Dossier Overview
Application number
CN202310335695
Inventor
ZHANG ZE; HE YIZUN; XIAO XIANG; HE ZHENGYU
Filing Date
Mar 24, 2023
Publication Date
Sep 24, 2024
Patent Family ID
92765284
IPC Classification
CPC Classification
The embodiment of the invention provides a photocathode, an electron source module and electronic equipment, relates to the technical field of electron beam emission, and is used for solving the problem that exciting light is absorbed or reflected when a photocathode electron source generates a high-resolution electron beam. The photocathode comprises a substrate, an emission layer and a first focusing layer. The first focusing layer and the substrate layer are stacked on the same side of the emission layer. Excitation light provided by the light source passes through the first focusing layer before passing through the substrate and reaching the emission layer. The first focusing layer comprises a plurality of first focusing microstructures, and the first focusing microstructures can focus exciting light from the light source and then transmit the exciting light to the emission layer so as to provide electron beams.
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