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Photocathode, electron source module and electronic equipment

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Source: EPO OPS

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92765284Family
§ Ⅰ

Dossier Overview

Applicant

HUAWEI TECH CO LTD

Application number

CN202310335695

Inventor

ZHANG ZE; HE YIZUN; XIAO XIANG; HE ZHENGYU

Filing Date

Mar 24, 2023

Publication Date

Sep 24, 2024

Patent Family ID

92765284

IPC Classification

H01J29/04H01J29/46H01J31/00

CPC Classification

G02B3/00H01J1/34H01J29/04H01J29/46H01J29/465H01J31/00

The embodiment of the invention provides a photocathode, an electron source module and electronic equipment, relates to the technical field of electron beam emission, and is used for solving the problem that exciting light is absorbed or reflected when a photocathode electron source generates a high-resolution electron beam. The photocathode comprises a substrate, an emission layer and a first focusing layer. The first focusing layer and the substrate layer are stacked on the same side of the emission layer. Excitation light provided by the light source passes through the first focusing layer before passing through the substrate and reaching the emission layer. The first focusing layer comprises a plurality of first focusing microstructures, and the first focusing microstructures can focus exciting light from the light source and then transmit the exciting light to the emission layer so as to provide electron beams.

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