一种N型单晶硅片的制备方法
本发明涉及单晶硅技术领域,尤其是涉及一种N型单晶硅片的制备方法。本发明提供的一种N型单晶硅片的制备方法,包括以下步骤:S1、将拉制P型硅的硅原料、磷硅母合金和锗元素添加剂依次进行化料、熔接、引晶、缩颈、放肩、等径和收尾,得到N型单晶硅棒;S2、将所述N型单晶硅棒切片后,依次进行第一退火处理和第二退火处理,得到所述N型单晶硅片。本发明的N型单晶硅片的制备方法,通过锗元素的添加,抑制了热施主的形成,降低了采用拉制P型硅的硅原料制得的N型单晶硅片的氧含量、电阻和缺陷密度。
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