Dossier

IMPEDANCE MATCHING MODULE, IMPEDANCE MATCHING CIRCUIT, PLASMA PROCESS SUPPLY SYSTEM AND PLASMA PROCESS SYSTEM

InventionPending

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§ Ⅰ

Dossier Overview

Applicant

TRUMPF Hüttinger GmbH + Co. KG

Inventor

NORDMANN, Birger

Filing Date

Feb 26, 2024

Publication Date

Jan 6, 2026

IPC Classification

H01JH03HH03HH05KH05K

CPC Classification

H01JH05KH05KH05KH01FH01F

External Resources