DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME

Applicant

Samsung Display Co., Ltd.

Inventor

LEE, Sungyong; KANG, Eugene; SEO, Changwook; SUNG, Byunghun; OH, Daeyoung; YUN, Seung Geun; LEE, Sangkeun; JEONG, Yongwoo

Filing Date

Jun 25, 2025

Publication Date

Jan 6, 2026