Dossier

ADAPTER APPARATUS AND SEMICONDUCTOR PROCESS DEVICE

InventionPending

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§ Ⅰ

Dossier Overview

Applicant

Beijing NAURA Microelectronics Equipment Co., Ltd.

Inventor

LIU, Dongxu; MA, Hongshuai; NAN, Jianhui; ZHAO, Hongyu

Filing Date

Feb 27, 2024

Publication Date

Jan 6, 2026

IPC Classification

F16LH01L

CPC Classification

Y02A

External Resources