Dossier

SUBSTRATE TREATMENT METHOD

InventionPending

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§ Ⅰ

Dossier Overview

Applicant

SCREEN Holdings Co., Ltd.

Inventor

NISHIMURA, Yuta

Filing Date

Feb 5, 2024

Publication Date

Jan 6, 2026

IPC Classification

G03FH01LH01L

CPC Classification

H01LH01LG03F

External Resources