SIGE NANORIBBONS FOR HIGH PERFORMANCE TRANSISTORS

原文（中文）

Manufacturing integrated circuit (IC) devices having adjacent transistors with different channel materials. A transistor includes a stack of nanoribbons coupling source and drain bodies, and a nanoribbon has a thickness at a midpoint of the nanoribbon greater than a thickness away from the midpoint. A second transistor may include a stack of nanoribbons coupling source and drain bodies, and the first transistor nanoribbons may have larger thickness variations than the second transistor nanoribbons. The first transistor nanoribbons may have a first element also in the second transistor nanoribbons and a second element absent in the second transistor nanoribbons. The second element may be added into the first transistor nanoribbons by depositing on the first transistor nanoribbons a layer having the second element, depositing a retaining layer over the second-element layer, and diffusing the second element into the first transistor nanoribbons.