一种大厚度二氧化钛靶材的等离子喷涂-冷等静压致密化方法
本发明涉及靶材技术领域,具体涉及一种大厚度二氧化钛靶材的等离子喷涂‑冷等静压致密化方法,包括以下步骤:靶材基体预处理,将纯铝背管采用丙酮超声清洗10‑15min,去除油污,然后等离子喷涂处理,热调化处理,再冷等静压,最后低温退火消除应力,即可;本发明显著提升靶材密度与致密度、开裂裂纹性以及靶材耐腐性,满足溅射镀膜严苛需求,采用等离子喷涂处理、热调化、冷等静压以及低温退火消除应力联合改进,得到的靶材性能实现协调改进,以及性能稳定性优异。
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