一种蒸气腐蚀设备和腐蚀方法
本申请涉及腐蚀设备领域,公开了一种蒸气腐蚀设备和腐蚀方法,设备包括:具有炉腔和开口的腐蚀炉体,所述炉腔的底部用于盛放腐蚀剂,所述开口位于所述腐蚀炉体的顶部;设于所述炉腔中的载具,用于竖直承载待腐蚀晶圆;设于所述腐蚀炉体的底部外侧的第一加热器,用于加热所述腐蚀剂产生腐蚀蒸气;设于所述开口处的气体控制组件,用于将所述炉腔内顶部的腐蚀蒸气压入所述炉腔的底部。该设备可以解决晶圆腐蚀时出现的裂片、晶体结构损坏以及腐蚀速率难以控制的问题,同时可以减少腐蚀剂的用量,降低腐蚀成本。
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